Thermal Compensated Pull-in Voltage MEMS Inclinometers
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2014
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2014.11.281